You won’t believe this, but the reason why I got this was a weird trailing backslash. I failed to find where it came from and after HOURS of searching, I found out it was because I had entered a variable in the process step and accidentally type ENTER before the variable. So it was essentially a CRLF followed by the variable name. For some reason, that caused the illegal character. Guess it was trying to insert the CRLF in the path … Well, check your variable listings in your steps to see if you have any leading or trailing enters …